69,95
Get the hands-on experience needed to design, fabricate and test MEMS devices with this practical guide. You will also learn to use foundry multi-project fabrication processes for low-cost MEMS projects, and end-of-chapter exercises and design challenges are provided, making this ideally suited for use in the classroom and by practising engineers.
- : Joel A.
- : Cambridge University Press
- : 9781107645790
- : Engels
- : Paperback
- : 178
- : augustus 2011
- : 450
- : 215 x 140 x 27 mm.
- : Technische toepassingen van elektronische, magnetische, optische materialen